E-beam evaporator HVB-130

The electron-beam evaporator HVB-130 (Winter Vakuumtechnik GbR) is equipped with an 8 slot crucible turret that enables subsequent evaporation of metals and certain oxides without source exchange or venting. The distance between evaporation source and the rotating sample stage is large enough to ensure a collimated and homogeneous material deposition (e.g. for lift-off structures). The evaporator is owned and operated by the Zaumseil group. For more information please contact Finn Sebastian.

Note: This device is not part of the ICF and is not available in general. However, contact the responsible person in case of interest.