Parylene-Coater SCS LABCOTER

The LABCOTER™ (PDS 2010, Specialty Coating Systems Inc.) is a parylene deposition system used to prepare uniform and pin-hole free parylene layers via chemical vapour deposition. Parylene layers are formed directly and conformally on any substrate in a two temperature step program (~250 °C and ~600 °C) inside a high-vacuum chamber. Layer thicknesses are determined by the amount of loaded parylene dimers (precursor) and can range from a few nm to a few μm.