FACULTY OF ENGENEERING SCIENCES
HEIDELBERG UNIVERSITY
IMSEAM
Facilities
Cleanroom
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Cleanroom
Cleanroom Equipment
Thin Film Deposition
Glovebox System with Spincoaters and Thermal Evaporators
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Sputtering System
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Electron-Beam Evaporator HVB-130
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Dry Etching
MARCH (Nordson) reactive ion etching system
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Lithography / Top Down Patterning
Electron-Beam Writer Raith eLINE Plus
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Photonic Professional GT2 Nanoscribe
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SUSS MicroTec Mask Aligner MA/BA6 Gen4
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Hoods and Benches
Work Benches, Fume Hoods and Flow Boxes
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