IMSEAM > Core Facility > Cleanroom > Cleanroom devices

Cleanroom devices

Thin Film Deposition

Glovebox System with Spincoaters and Thermal Evaporators

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Sputtering System

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Electron-Beam Evaporator HVB-130

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Dry Etching

MARCH (Nordson) reactive ion etching system

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Lithography / Top Down Patterning

Electron-Beam Writer Raith eLINE Plus

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Photonic Professional GT2 Nanoscribe

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SUSS MicroTec Mask Aligner MA/BA6 Gen4

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Hoods and Benches

Work Benches, Fume Hoods and Flow Boxes

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